Semiconductors
Chemical engineering
About This Innovation
worked on military vision systems for missiles used in both Gulf Wars; holds 6 patents
The Invention
Method of making infrared detector with channel stops; Hybrids semiconductor circuit; Method for dry etching vias in integrated circuit layers; Semiconductor hybrids & method of making same
Key Information
Category:
Chemical engineering
Completion Status:
yes
Patent Number:
5523241; 5473187; 5017511; 5157000; 5244839; 5405807
Co-Inventor:
Chang-Feng Wan; Joseph D. Luttmer; David E. fleming; James C. Baker; Emily A. Groves; Douglas Paradis; Charles P. Monaghan; Barry Lanier; Thomas d. Bonifield; Glenn A. Cerny; Jerome L. Elkind; Patricia B. Smith; Larry D. Hutchins; Rudy L. York
Patent Information
Patent Number: 5523241; 5473187; 5017511; 5157000; 5244839; 5405807
Technical Specifications
Method of making infrared detector with channel stops; Hybrids semiconductor circuit; Method for dry etching vias in integrated circuit layers; Semiconductor hybrids & method of making same
Collaboration
Co-Inventor: Chang-Feng Wan; Joseph D. Luttmer; David E. fleming; James C. Baker; Emily A. Groves; Douglas Paradis; Charles P. Monaghan; Barry Lanier; Thomas d. Bonifield; Glenn A. Cerny; Jerome L. Elkind; Patricia B. Smith; Larry D. Hutchins; Rudy L. York